Tel:(408)727-1001     1600 Wyatt Dr., Ste. 7   Santa Clara, CA 95054


Nikon Research Corporation of America

Mask aligner stage positioning system

  • six-axis fine positioning stage
  • closed-loop high precision, high speed sensing
  • enhanced laser interferometer beam accuracy
  • lamininar flow radial duct
  • temperature-controlled air flow to a fraction of a degree

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