Tel:(408)727-1001     1600 Wyatt Dr., Ste. 7   Santa Clara, CA 95054

Nikon Research Corporation of America

Transfer and positioning of large optical assembly

  • air bearing conveying system
  • precision registration
  • 700 Kg assembly traveling more than 1 meter to position accuracy better than 2 microns
  • large invar casting
  • 3-axis high speed wafer transport system